Method for preparing layered metal oxide field effect material

US10475933B1 · kind B1 · utility

Assignee

• YUNNAN UNIVERSITY · CN

Inventors

• Zhenghong Lu · Kunming, CN
• Tao Zhang · Beijing, CN
• Dengke Wang · Kunming, CN

Key dates

• Filing date: Oct 12, 2018
• Grant date: Nov 12, 2019
• Expiry date: Oct 12, 2038

Classification

• Technology area (CPC H): Electricity
• CPC primary: H10K77/111

Abstract

A method for preparing a layered metal oxide field effect material includes depositing a first metal oxide, a core-layer metal, and a second metal oxide sequentially on the substrate by vacuum vapor deposition, the first metal oxide and the core-layer metal undergoing a redox reaction to form a first surface layer and a core-layer precursor on the substrate, and the core-layer precursor and the second metal oxide undergoing a redox reaction to form a core layer and a second surface layer; and the band gap of the metal oxide in the core layer is ≥3 eV, the band gaps of the metal oxide in the first surface layer and the second surface layer are independently ≤3 eV, and the difference between the band gap of the metal oxide in the core layer and the band gap of the metal oxide in the first surface layer is ≥1 eV. The present preparation method has advantages of simple operation, a low production cost, a good film forming property, and the high carrier mobility of the product.