Physically contactable graphene electro-optic modulator and method for manufacturing the same
US10481419B1 · kind B1 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 17, 2019 |
| Grant date | Nov 19, 2019 |
| Priority date | — |
| Expiry date | Jan 17, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/0118
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Embodiments are directed to a method for manufacturing a graphene electro-optic modulator, which is freely attachable to and detachable from an optical waveguide and modulates a light according to an electric signal. The method includes: forming two metal electrodes on an oxide film formed on a substrate, the two metal electrodes being spaced apart from each other; synthesizing a first graphene film at a metal foil; coating the first graphene film with a polymer membrane; removing the metal foil at which the first graphene film is synthesized; and transferring the first graphene film coated with the polymer membrane onto the oxide film, wherein the first graphene film is electrically connected to any one of the two metal electrodes. There is also provided a graphene electro-optic modulator manufactured by the method.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.