Patent · US Active

Charged particle beam device, multi-beam blanker for a charged particle beam device, and method for operating a charged particle beam device

US10483080B1 · kind B1 · utility

7Cited by

3References

21Claims

0Family size

Assignee

ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH · DE

Inventors

Benjamin John Cook · Munich, DE
Dieter Winkler · Munich, DE

Key dates

Filing date	Jul 17, 2018
Grant date	Nov 19, 2019
Priority date	—
Expiry date	Jul 17, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH01J2237/28
WIPO fieldElectrical machinery, apparatus, energy
WIPO sectorElectrical engineering

Abstract

A charged particle beam dump for a charged particle beam device is described. The beam dump includes an annular shaped body having an inner perimeter wall that defines an open annulus for passing of primary charged particle beamlets, the annular shaped body further having an outer perimeter wall and a bottom wall; and an annular shaped electrode provided partially above the annular shaped body having an inner perimeter side and an outer perimeter side, wherein the inner perimeter side is outside of the radius of the inner perimeter wall of the annular shaped body.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.