Highly sensitive capacitive force sensor that is minimally affected by temperature changes and in-phase noise
US10488280B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 20, 2018 |
| Grant date | Nov 26, 2019 |
| Priority date | — |
| Expiry date | Apr 12, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L5/165
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A capacitive force sensor that is inexpensive but highly sensitive, and hardly affected by temperature changes and in-phase noise in the use environment is provided. a capacitive force sensor that is inexpensive but highly sensitive, and is hardly affected by temperature changes and in-phase noise in the use environment. A force sensor includes: a deformable body having a force receiving portion and a fixed portion; a displacement body that is connected to the deformable body, and is displaced by elastic deformation caused in the deformable body; and a detection circuit that detects an applied force, in accordance with the displacement caused in the displacement body. The deformable body includes a tilting portion that has a longitudinal direction and is disposed between the force receiving portion and the fixed portion. The displacement body includes displacement portions that are connected to the tilting portion and are displaced by tilting movement of the tilting portion. The detection circuit includes capacitive elements disposed at the displacement portions, and detects an applied force, in accordance with changes in the capacitance values of the capacitive elements.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.