Micromechanical component and method for adjusting an adjustable part simultaneously about two axes of rotation inclined in relation to one another

US10488650B2 · kind B2 · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Helmut Grutzeck · Tübingen, DE
• Joerg Muchow · Reutlingen, DE
• Mirko Hattass · Stuttgart, DE
• Stefan Mark · Würzburg, DE
• Thorsten Balslink · Kirchentellinsfurt, DE
• Frank Schatz · Kornwestheim, DE

Key dates

• Filing date: May 24, 2017
• Grant date: Nov 26, 2019
• Expiry date: May 24, 2037

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/101
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

A micromechanical component includes an adjustable part, a mounting, at least one bending actuator, and a permanent magnet. The part is positioned on the mounting so as to be adjustable relative to the mounting about a first rotation axis and about a second rotation axis inclined relative to the first axis. The actuator includes at least one movable subregion. Movement of the subregion results in a restoring force that moves the part about the first axis. The part is connected indirectly to the magnet to be adjustable about the second axis of rotation via a magnetic field built up by the magnet together with a yoke device of the component or an external yoke. A micromirror device includes the micromechanical component. A method for adjusting the part includes adjusting the part simultaneously about the first and the second axes.