Patent · US Active

Flexible linear sensor

US10490430B2 · kind B2 · utility

1Cited by

8References

20Claims

0Family size

Assignee

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD. · TW

Inventors

Min-Chuan Hsiao · Baoshan, TW
Meng-Tsung Lin · Baoshan, TW
Chen-Wei Chen · Beijing, CN

Key dates

Filing date	Oct 30, 2017
Grant date	Nov 26, 2019
Priority date	—
Expiry date	Oct 30, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG01N27/121
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

An apparatus includes: a sensor configured to produce a change in a parameter value when in contact with a liquid, wherein the sensor is flexibly linear and configured to traverse a path within a semiconductor processing system; and a controller configured to produce an alert signal based on the change in the parameter value.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.