Patent · US Active

Fabrication of multilayer nanograting structures

US10490679B2 · kind B2 · utility

0Cited by
11References
19Claims
0Family size

Assignee

Inventors

Key dates

Filing dateOct 12, 2018
Grant dateNov 26, 2019
Priority date
Expiry dateOct 12, 2038

Classification

  • Technology area (CPC B)Performing Operations; Transporting
  • CPC primaryB82Y40/00
  • WIPO fieldOptics
  • WIPO sectorInstruments

Abstract

Provided are nanograting structures and methods of fabrication thereof that allow for stable, robust gratings and nanostructure embedded gratings that enhance electromagnetic field, fluorescence, and photothermal coupling through surface plasmon or, photonic resonance. The gratings produced exhibit long term stability of the grating structure and improved shelf life without degradation of the properties such as fluorescence enhancement. Embodiments of the invention build nanograting structures layer-by-layer to optimize structural and optical properties and to enhance durability.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.