Transversely-excited film bulk acoustic resonator
US10491192B1 · kind B1 · utility
230Cited by
7References
36Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2018 |
| Grant date | Nov 26, 2019 |
| Priority date | — |
| Expiry date | Dec 21, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/877
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
Acoustic resonator devices and filters are disclosed. An acoustic resonator includes a substrate and a piezoelectric plate having parallel front and back surfaces, the back surface attached to the substrate. An interdigital transducer (IDT) is formed on the front surface of the piezoelectric plate such that interleaved fingers of the IDT are disposed on a portion of the piezoelectric plate suspended over a cavity formed in the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.