Electrochemical polishing of non-uniform features
US10493549B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | May 18, 2017 |
| Grant date | Dec 3, 2019 |
| Priority date | — |
| Expiry date | Jan 5, 2038 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25F7/00
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
A method of controlling a working gap between one or more cathodic tools and an anodic workpiece in an electrochemical material dissolution process, the method comprising: providing a cathodic tool and an anodic workpiece defining a working gap therebetween, the cathodic tool and the workpiece being at least partially immersed in a conductive electrolyte solution; providing a negative electrical potential to the cathodic tool; monitoring one or more of the electrical potential, current, current density and charge between the cathodic tool and the anode to determine the working gap between the cathodic tool and the anode; and, controlling one or more process parameters to maintain one or more of the working gap and electrochemical working conditions between the cathodic tool and anodic workpiece at a targeted value.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.