Sensor including mechanical resonator with nano-structured surface
US10495607B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jan 14, 2016 |
| Grant date | Dec 3, 2019 |
| Priority date | — |
| Expiry date | Apr 21, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N2291/02809
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A dissipation-based sensor includes a single resonator with a nano-structured surface. The sensor exhibits improved sensitivity, up to about 2 orders of magnitude higher than a single resonator without a nano-structured surface. The sensor operates by measuring and estimating the fluid friction per oscillation cycle, operating in normal conditions without vacuum (e.g., in air or other ambient gas) at room temperature. The sensor can provide measurement data at a speed that is orders of magnitude faster than pre-existing resonance-based methods, as it is based on measurements from a few cycles only. The dissipation-based sensor may be utilized in a broad range of fast, inexpensive, hand-held measuring devices. Additionally, the sensor is capable of operating at standard temperature and pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.