Patent · US Active

Autofocus method and autofocus device

US10495867B2 · kind B2 · utility

1Cited by

224References

19Claims

0Family size

Assignee

Sakura Finetek U.S.A., Inc. · US

Inventors

Paul Hing · Sigmaringen, DE
Sven Hensler · Gaienhofen, DE

Key dates

Filing date	Apr 6, 2016
Grant date	Dec 3, 2019
Priority date	—
Expiry date	Jul 24, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG02B21/247
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The invention is based on an autofocus method in which light from a light source is focused at a measurement light focus in a sample and is reflected from there and the reflected light is guided through an optical system in two light paths onto at least two detector elements. In order to achieve fast and accurate automatic focusing on the sample, it is proposed that the measurement light focus is moved in layers of the sample which reflect light to different extents, and the detector elements are arranged in such a way that, in this case, profiles of a radiation property registered by the detector elements are different and a focus position is set in a manner dependent on the profiles.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.