Apparatus, system and method of mass flow controlling for use in integrated gas delivery system
US10496110B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 25, 2014 |
| Grant date | Dec 3, 2019 |
| Priority date | — |
| Expiry date | Oct 18, 2034 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D7/0635
- WIPO fieldControl
- WIPO sectorInstruments
Abstract
An apparatus of mass flow controlling for use in an integrated gas delivery system, comprising an input terminal, an output terminal, a sensor unit, a flow rate control valve, and a control unit. The control unit comprises an A/D converter, a microprocessor, and a valve control circuit. The A/D converter converts an actual setting signal inputted by the input terminal into a first digital signal, and converts a flow rate detection signal outputted by the sensor unit into a second digital signal. The microprocessor further comprises a storage module, a setting signal calibration module and a calculation module. The valve control circuit generates, based on a control signal, an openness control signal, so as to control the flow rate control valve. It is concluded that the flow rate control quality is improved by the present invention.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.