Developing device and developing method
US10500607B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Nov 25, 2017 |
| Grant date | Dec 10, 2019 |
| Priority date | — |
| Expiry date | Nov 25, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10K71/231
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Disclosed is a developing device for developing a substrate, comprising: a developing tank, a recovery box and a conveying unit provided right above the developing tank and configured to convey the substrate; wherein the developing tank comprises a first tank, a second tank and a third tank, which are spaced and are sequentially arranged; the recovery box comprises a first box and a second box; the first tank is communicated with the first box; as the substrate is arranged in the second tank, the second tank is communicated with the first box; as the substrate is arranged in the third tank, the third tank is communicated with the second box. The developing device can solve the technical problems of separately recovering the developers doped with different photoresist concentrations during the development of the substrate to reduce the cost of diluting the developer concentration in the recovery box.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.