Self-aligned tunable metamaterials
US10501867B2 · kind B2 · utility
1Cited by
3References
21Claims
0Family size
Inventors
Key dates
| Filing date | Mar 15, 2016 |
| Grant date | Dec 10, 2019 |
| Priority date | — |
| Expiry date | Apr 23, 2037 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/24322
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A self-aligned tunable metamaterial is formed as a wire mesh. Self-aligned channel grids are formed in layers in a silicon substrate using deep trench formation and a high-temperature anneal. Vertical wells at the channels may also be etched. This may result in a three-dimensional mesh grid of metal and other material. In another embodiment, metallic beads are deposited at each intersection of the mesh grid, the grid is encased in a rigid medium, and the mesh grid is removed to form an artificial nanocrystal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.