Method and apparatus for measuring errors of movable platform in multiple degrees of freedom
US10502559B2 · kind B2 · utility
0Cited by
2References
29Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 24, 2017 |
| Grant date | Dec 10, 2019 |
| Priority date | — |
| Expiry date | Oct 25, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B9/02
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention relates to a method and an apparatus for measuring errors of a movable platform in multiple degrees of freedom. A light-source module disposed on a fixed platform emits light to a lens module disposed on a movable platform. The light is reflected to one or more optoelectronic sensing module on the fixed platform via the lenses of the lens module. Then a processing unit calculates an alignment error or/and one or more straightness error or/and one or more angle error of the movable platform according to the signal generated by the optoelectronic sensing module.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.