Piezoelectric thin film and bulk acoustic wave filter
US10505514B2 · kind B2 · utility
2Cited by
2References
10Claims
0Family size
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Key dates
| Filing date | Apr 11, 2018 |
| Grant date | Dec 10, 2019 |
| Priority date | — |
| Expiry date | Aug 4, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/076
- WIPO fieldBasic communication processes
- WIPO sectorElectrical engineering
Abstract
A piezoelectric thin film comprises aluminum nitride containing a monad and at least one type among a tetrad and a pentad. The piezoelectric thin film having a large electromechanical coupling factor and a small stiffness.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.