MEMS switch and electronic device
US10508025B2 · kind B2 · utility
0Cited by
5References
9Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Sep 2, 2016 |
| Grant date | Dec 17, 2019 |
| Priority date | — |
| Expiry date | Feb 15, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01H2057/006
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A MEMS switch includes a first signal line provided in a first beam, a first GND adjacent to the first signal line, a second signal line provided in a second beam, and a second GND adjacent to the second signal line. A contact terminal is fixed to any one of the first signal line and the second signal line and performs connection between the first signal line and the second signal line according to deformation of the first beam.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.