Patent · US Active

Method for manufacturing diamond-like carbon film

US10508342B2 · kind B2 · utility

0Cited by

8References

20Claims

0Family size

Assignee

CREATING NANO TECHNOLOGIES, INC. · TW

Inventors

Shih-Ming Huang · New Taipei, TW
Jie Huang · Shanghai, CN
Wei Yang · Hefei, CN

Key dates

Filing date	Aug 29, 2016
Grant date	Dec 17, 2019
Priority date	—
Expiry date	Aug 29, 2036

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C16/46
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A method for manufacturing a diamond-like carbon film is described, which includes the following steps. A substrate is disposed into a chamber. An aromatic cyclic hydrocarbon is introduced into the chamber. A diamond-like carbon film is grown on the substrate by using the aromatic cyclic hydrocarbon as a reaction precursor The step of growing the diamond-like carbon film includes controlling a substrate temperature at 200 Celsius degrees to 800 Celsius degrees.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.