Process for forming a transition zone terminated superconformal filling

US10508358B2 · kind B2 · utility

Assignee

• Government of the United States of America, as represented by the Secretary of Commerce · US

Inventors

• Daniel Josell · Gaithersburg, US
• Thomas P. Moffat · Gaithersburg, US

Key dates

• Filing date: Apr 17, 2017
• Grant date: Dec 17, 2019
• Expiry date: May 25, 2037

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01L21/76898
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

Forming a transition zone terminated superconformal filling in a recess includes: providing an electrodeposition composition including: a metal electrolyte including a plurality of metal ions, solvent, and suppressor; providing the article including: a field surface and the recess that includes a distal position and a proximate position; exposing the recess to the electrodeposition composition; potentiodynamically controlling an electric potential of the recess with a potential wave form; bifurcating the recess into an active metal deposition region and a passive region; forming a transition zone; decreasing the electric potential of the recess by the potential wave form; progressively moving the transition zone closer to the field surface and away from the distal position; and reducing the metal ions and depositing the metal in the active metal deposition region and not in the passive region to form the transition zone terminated superconformal filling in the recess of the substrate.