Transparent measuring probe for beam scanning

US10508950B2 · kind B2 · utility

Assignee

• Primes GmbH Messtechnik für die Produktion mit Laserstrahlung · DE

Inventors

• Reinhard Kramer · Pfungstadt, DE
• Otto Märten · Dreieich, DE
• Stefan Wolf · Schwieberdingen, DE
• Roman Niedrig · Berlin, DE

Key dates

• Filing date: Nov 29, 2016
• Grant date: Dec 17, 2019
• Expiry date: Nov 29, 2036

Classification

• Technology area (CPC G): Physics
• CPC primary: G01J2001/4261
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

The invention relates to a measuring probe for scanning light beams (10) or laser beams. The measuring probe is suitable for scanning laser beams with very high power and for determining geometric parameters of a light beam (10) with high spatial resolution. For this purpose, a device is proposed which comprises a body (20), a probe area (30) and a detector (40). The body (20) is made of an optically transparent material and has a light beam entry surface (22), a light beam exit surface (23) and a detection light exit surface (25). The light beam entry surface (22) and the light beam exit surface (23) are for the most part smooth and polished. The body (20) includes the probe area (30) having light-deflecting structuring. The detector (40) is designed to detect at least part of the beam portion (15) deflected from the light beam (10) by the probe area (30). The body (20) and the light beam (10) are movable in two different directions of movement (51, 52) perpendicular to the direction of the axis (11) of the light beam (10) relative to each other. The probe area (30) has a shape whose two-dimensional projection on a surface perpendicular to the axis (11) of the light beam (10) appr…