Optical test system and method for determining size of gap between two substrates of optical element
US10508971B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jun 28, 2018 |
| Grant date | Dec 17, 2019 |
| Priority date | — |
| Expiry date | Jun 28, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B27/4266
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
An optical test method is provided. The optical test method includes emitting light through a gap between two substrates of a tested optical element disposed on a holder to generate a plurality of light beams. The optical test method further includes driving the holder with the tested optical element to move to N positions. The optical test method also includes receiving one of the light beams from the tested optical element in the N positions to generate N first intensity signals. In addition, the optical test method includes determining the size of the gap of the tested optical element according to the N first intensity signals and reference data.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.