Patent · US Active

Optical assembly having a thermally conductive component

US10509336B2 · kind B2 · utility

2Cited by

1References

34Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Julian Kaller · Oberkochen, DE
Franz Sorg · Aalen, DE
Ralf Winter · Tegernsee, DE
Karl-Stefan Weissenrieder · Langenau, DE

Key dates

Filing date	May 25, 2017
Grant date	Dec 17, 2019
Priority date	—
Expiry date	Dec 27, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG03F7/70958
WIPO fieldOptics
WIPO sectorInstruments

Abstract

An optical assembly includes: an optical element, which is transmissive or reflective to radiation at a used wavelength and has an optically used region; and a thermally conductive component, which is arranged outside the optically used region of the optical element. The thermally conductive component can include a material having a thermal conductivity of more than 500 W m−1 K−1. Additionally or alternatively, the product of the thickness of the thermally conductive component in millimeters and the thermal conductivity of the material of the thermally conductive component is at least 1 W mm m−1 K−1.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.