Optimized pressure regulation for and with a vacuum valve
US10509423B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Mar 7, 2018 |
| Grant date | Dec 17, 2019 |
| Priority date | — |
| Expiry date | Jul 17, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG05D16/2013
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A valve system having a vacuum valve with a valve seat having a valve opening defining an opening axis and a first sealing surface around the valve opening, a valve closure having a second sealing surface and a drive unit coupled to the valve closure. A control and regulating unit preforming a pre-regulating step and a regulating step for the valve closure in a regulating cycle, the pre-regulating step moves the valve closure to a defined position and the regulating step the closure position is varied based on a determined control variable and a target value. The regulating and control unit updates at least during a part of the regulating cycle and a regulating profile is derived, the regulating profile is compared with a reference regulating profile and a regulating deviation is derived, an adapted pre-regulating position is provided as the actual pre-regulating position for the regulating cycle.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.