Patent · US Active

Method and apparatus for producing fused quartz from a polymerizable polyalkylsiloxane compound with membrane filter as cleaning device

US10513454B2 · kind B2 · utility

0Cited by
5References
28Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 17, 2016
Grant dateDec 24, 2019
Priority date
Expiry dateJun 26, 2036

Classification

  • Technology area (CPC C)Chemistry; Metallurgy
  • CPC primaryC03B2207/81
  • WIPO fieldOther special machines
  • WIPO sectorMechanical engineering

Abstract

A method for producing synthetic fused quartz is provided. The method includes evaporating a feedstock material which contains at least one polymerizable polyalkylsiloxane compound, and supplying the feedstock material vapor to a reaction zone, wherein the feedstock material vapor is converted by oxidation and/or by hydrolysis into SiO2 particles. The feedstock material vapor is passed through a membrane filter as a cleaning device to reduce the formation of gel, which is typically associated with the production of synthetic fused quartz.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.