Method and apparatus for producing fused quartz from a polymerizable polyalkylsiloxane compound with membrane filter as cleaning device
US10513454B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 17, 2016 |
| Grant date | Dec 24, 2019 |
| Priority date | — |
| Expiry date | Jun 26, 2036 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC03B2207/81
- WIPO fieldOther special machines
- WIPO sectorMechanical engineering
Abstract
A method for producing synthetic fused quartz is provided. The method includes evaporating a feedstock material which contains at least one polymerizable polyalkylsiloxane compound, and supplying the feedstock material vapor to a reaction zone, wherein the feedstock material vapor is converted by oxidation and/or by hydrolysis into SiO2 particles. The feedstock material vapor is passed through a membrane filter as a cleaning device to reduce the formation of gel, which is typically associated with the production of synthetic fused quartz.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.