Quad proof mass MEMS gyroscope with outer couplers and related methods
US10514259B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 31, 2016 |
| Grant date | Dec 24, 2019 |
| Priority date | — |
| Expiry date | Dec 30, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5705
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A two-axis microelectromechanical systems (MEMS) gyroscope having four proof masses disposed in respective quadrants of a plane is described. The quad proof mass gyroscope may comprise an inner coupler passing between a first and a third proof mass and between a second and a fourth proof mass, and coupling the four proof masses with one another. The quad proof mass gyroscope may further comprising a first outer coupler coupling the first and the second proof masses and a second outer coupler coupling the third and the fourth proof masses. The outer couplers may have masses configured to balance the center of masses of the four proof masses, and may have elastic constants matching the elastic constant of the inner coupler. The quad gyroscope may further comprise a plurality of sense capacitors configured to sense angular rates.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.