Thermal flow meter with an asymmetrical inflow-side of circuit package
US10514287B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2017 |
| Grant date | Dec 24, 2019 |
| Priority date | — |
| Expiry date | Jan 5, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F15/14
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A thermal flowmeter circuit package having a side of a measurement surface 430 of the circuit package and a flow path 387 at a side of the backside of measurement surface 431 of a rear surface of the measurement surface 430, and an inflow-side end surface of the circuit package for dividing the measurement target gas 30 has different shapes at the side of the measurement surface and at the side of the backside of measurement surface. The inflow-side end surface of the circuit package for dividing the measurement target gas 30 is formed with a reference line 700 dividing the measurement target gas 30, and an end surface 701a at the side of the measurement surface with respect to the reference line and an end surface 701b at the side of the backside of measurement surface with respect to the reference line are formed to be asymmetrical.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.