Patent · US Active

Gas density increase measurement in a film chamber

US10514317B2 · kind B2 · utility

1Cited by

5References

6Claims

0Family size

Assignee

INFICON AG · LI

Inventors

Daniel Wetzig · Cologne, DE
Silvio Decker · Cologne, DE

Key dates

Filing date	Mar 12, 2015
Grant date	Dec 24, 2019
Priority date	—
Expiry date	Mar 12, 2035

Classification

Technology area (CPC G)Physics
CPC primaryG01N2021/651
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method for a tightness test of a test piece (16) in a test chamber (10) whose wall is at least partly made of a flexible material, wherein said test piece is introduced into said test chamber and said test chamber is then evacuated, is characterized in that the tightness test is performed by measuring the gas density inside said test chamber (10) in the area outside said test piece (16).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.