Thin film inductor and manufacturing method thereof
US10515752B2 · kind B2 · utility
4Cited by
1References
7Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 21, 2016 |
| Grant date | Dec 24, 2019 |
| Priority date | — |
| Expiry date | Feb 26, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01F2027/2809
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A thin film inductor includes a body including a coil part disposed therein, wherein the coil part includes a patterned insulating film disposed on a substrate and a coil pattern formed between the patterned insulating films, the coil pattern having a lower height than the insulating film, such that the coil pattern may be formed in a structure with a high aspect ratio while having a uniform thickness, thereby increasing a cross-sectional area of the coil part and improving direct current resistance (Rdc) characteristics.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.