Cathodic arc deposition apparatus and method
US10515785B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Sep 8, 2017 |
| Grant date | Dec 24, 2019 |
| Priority date | — |
| Expiry date | Aug 3, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/332
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A coating method includes vaporizing a portion of a cathode to form a metallic plasma, and directing the metallic plasma toward the workpiece. A first magnetic field generator, disposed in a first electrically conductive portion of a first stinger cup, is operated to steer the electrical arc about at least one evaporative surface of the cathode. a second portion of the electrically conductive stinger cup is selectively contacted with the cathode, and the first portion of the first stinger cup is spaced from the second portion from by a thermally insulating layer therebetween. The thermally insulating layer is disposed directly between the first magnetic field generator and the cathode when the first stinger cup is in contact with the cathode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.