Reliable high-speed oxide-confined vertical-cavity surface-emitting laser

US10516251B2 · kind B2 · utility

Assignee

• VI SYSTEMS GmbH · DE

Inventors

• Nikolay Ledentsov · Berlin, DE
• Vitaly Shchukin · Berlin, DE

Key dates

• Filing date: Jun 23, 2017
• Grant date: Dec 24, 2019
• Expiry date: Jun 23, 2037

Classification

• Technology area (CPC H): Electricity
• CPC primary: H01S5/205
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

An oxide-confined vertical cavity surface emitting laser including a distributed Bragg reflector (DBR) wherein the layers of the (DBR) includes a multi-section layer consisting of a first section having a moderately high aluminum composition, an second section which is an insertion having a low aluminum composition, and a third section which is an oxide-confined aperture formed by partial oxidation of a layer having a high aluminum composition (95% and above). A difference in aluminum composition between a high value in the aperture layer and a moderately high value in the first section prevents non-desirable oxidation of the first section from the mesa side while the aperture layer is being oxidized. A low aluminum composition in the second section prevents non-desirable oxidation in the vertical direction of the layer adjacent to the targeted aperture layer.