Voltage generator, voltage waveform generator, semiconductor device manufacturing apparatus, voltage waveform generation method, and semiconductor device manufacturing method
US10516388B1 · kind B1 · utility
9Cited by
8References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 31, 2019 |
| Grant date | Dec 24, 2019 |
| Priority date | — |
| Expiry date | Jan 31, 2039 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH03K3/021
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A voltage generator includes a pulse circuit and a slope circuit. The pulse circuit is to apply voltages of three different levels to an output terminal and the slope circuit is to apply a slope voltage to the output terminal. The slope circuit includes an inductor to take current out of a capacitive load connected to the output terminal.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.