Patent · US Active

Semiconductor device and method of producing a semiconductor device

US10519034B2 · kind B2 · utility

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5Claims

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Assignee

Fraunhofer-Gesellschaft zur förderung der angewandten Forschung e.V. · DE

Inventors

Sabine Trupp · Saalfeld, DE
Michael Henfling · Munich, DE
Karl Neumeier · Taufkirchen, DE

Key dates

Filing date	Jan 19, 2018
Grant date	Dec 31, 2019
Priority date	—
Expiry date	Jan 19, 2038

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/13072
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A method of producing a semiconductor device includes providing a carrier structure having a semiconductor substrate; applying or introducing a precursor substance onto or into the carrier structure, treating the precursor substance for producing a porous matrix structure; introducing a functionalization substance into the porous matrix structure.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.