Vacuum gauge state detection method and system
US10520385B2 · kind B2 · utility
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8Claims
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Key dates
| Filing date | Apr 19, 2017 |
| Grant date | Dec 31, 2019 |
| Priority date | — |
| Expiry date | Jan 1, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01L9/0073
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A state determination unit compares an output value obtained by a measuring unit with a reference characteristic value that serves as a reference, counts the number of times an excessive pressure application state occurs in which the output value is determined to be equal to or larger than the reference characteristic value, and determines whether the number of times reaches an upper limit that is set. An alarm output unit outputs an alarm when the state determination unit determines that the number of times the output value is equal to or larger than the reference characteristic value reaches the set upper limit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.