Variable thickness diaphragm for a wideband robust piezoelectric micromachined ultrasonic transducer (PMUT)
US10522737B2 · kind B2 · utility
3Cited by
7References
24Claims
0Family size
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Key dates
| Filing date | Apr 21, 2016 |
| Grant date | Dec 31, 2019 |
| Priority date | — |
| Expiry date | Jun 14, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10N30/853
- WIPO fieldOther consumer goods
- WIPO sectorOther fields
Abstract
A diaphragm for a piezoelectric micromachined ultrasonic transducer (PMUT) is presented having resonance frequency and bandwidth characteristics which are decoupled from one another into independent variables. Portions of at least the piezoelectric material layer and backside electrode layer are removed in a selected pattern to form structures, such as ribs, in the diaphragm which retains stiffness while reducing overall mass. The patterned structure can be formed by additive, or subtractive, fabrication processes.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.