Patent · US Active

MEMS actuation systems and methods

US10523135B2 · kind B2 · utility

12Cited by

11References

18Claims

0Family size

Assignee

MEMS Drive, Inc. · US

Inventors

Matthew Ng · Rosemead, US
Xiaolei Liu · Los Angeles, US
Guiqin Wang · Arcadia, US

Key dates

Filing date	Sep 8, 2017
Grant date	Dec 31, 2019
Priority date	—
Expiry date	Jan 2, 2038

Classification

Technology area (CPC B)Performing Operations; Transporting
CPC primaryB81C2203/032
WIPO fieldAudio-visual technology
WIPO sectorElectrical engineering

Abstract

A method of manufacturing a micro-electrical-mechanical system (MEMS) assembly includes mounting a micro-electrical-mechanical system (MEMS) actuator to a metal plate. An image sensor assembly is mounted to the micro-electrical-mechanical system (MEMS) actuator. The image sensor assembly is electrically coupled to the micro-electrical-mechanical system (MEMS) actuator, thus forming a micro-electrical-mechanical system (MEMS) subassembly.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.