Micro three-dimensional shell resonator gyroscope
US10527422B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Dec 15, 2016 |
| Grant date | Jan 7, 2020 |
| Priority date | — |
| Expiry date | Jul 6, 2037 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81C1/00285
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
The present invention discloses a micro three-dimensional shell resonator gyroscope, a method for fabricating a micro shell resonator, a method for fabricating a composite structure substrate, and a method for fabricating a micro three-dimensional shell resonator gyroscope. A micro three-dimensional shell resonator gyroscope includes a packaging shell cover, a micro shell resonator, and a composite structure substrate. The micro shell resonator includes a shell, a single-ended column, and a flange. The composite structure substrate includes a non-planar electrode, a conductive structure, an electrical isolation part, and a main body part. The non-planar electrode includes a driving electrode, a detection circuit, an annular exciting electrode, and an isolation electrode.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.