Thermal phase shifters for optical phased arrays
US10527906B2 · kind B2 · utility
4Cited by
3References
25Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jan 29, 2018 |
| Grant date | Jan 7, 2020 |
| Priority date | — |
| Expiry date | Jan 29, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02F1/0147
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Aspects of the present disclosure describe photonic integrated circuits on a common substrate including an optical phased array having a plurality of emitters and a plurality of thermal phase shifters in which the thermal phase shifters are thermally isolated from one another through the effect of one or more trenches formed over and/or under and/or around the thermal phase shifters and/or waveguides including same.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.