Thin-film capacitor
US10529495B2 · kind B2 · utility
0Cited by
14References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Oct 5, 2017 |
| Grant date | Jan 7, 2020 |
| Priority date | — |
| Expiry date | Oct 5, 2037 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01G4/1254
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A thin-film capacitor includes a capacitor section in which electrode layers and dielectric layers are alternately stacked and which includes a hole portion that extends to the electrode layer. In a cross-section which is perpendicular to a stacking surface of the capacitor section and which passes through the hole portion, a side surface of the hole portion extends along a reference line extending in a direction intersecting the stacking surface, the dielectric layer extends up to the reference line toward the hole portion, and a gap is formed between the side surface of the pair electrode layer and the reference line.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.