Patent · US Active

System and method for stripline electrodes for thin-film characterization

US10529674B2 · kind B2 · utility

0Cited by

2References

19Claims

0Family size

Assignee

Northwestern University · US

Inventors

Matthew Grayson · Evanston, US
Yang Tang · Pleasanton, US

Key dates

Filing date	Nov 28, 2017
Grant date	Jan 7, 2020
Priority date	—
Expiry date	Dec 18, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH01L2924/0002
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

Systems and methods provide a device for characterizing a thin film, including a conducting or insulating substrate, an active layer on the conducting or insulating substrate to be characterized, and a plurality of stripline electrodes on the active layer. The plurality of stripline electrodes include a pitch width of a same order as the thickness of the active layer and strip width smaller than the thickness of the active layer.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.