Patent · US Active

Semiconductor device

US10529799B2 · kind B2 · utility

1Cited by
2References
8Claims
0Family size

Assignee

Inventors

Key dates

Filing dateJun 2, 2017
Grant dateJan 7, 2020
Priority date
Expiry dateJun 2, 2037

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH10D64/661
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

A semiconductor device includes a semiconductor substrate, and a semiconductor layer disposed on the semiconductor substrate. First and second pillar layers, of respective first and second conductivity types, are alternately provided in a direction in parallel with a main surface in an active region of the semiconductor layer and in a termination region. A pillar pitch in the termination region is set to be larger than a pillar pitch in the active region. A product of a width of one of the first pillar layers and effective impurity concentration of the first conductivity of the one of the first pillar layers is equal to a product of a width of one of the second pillar layers and effective impurity concentration of the second conductivity of the one of the second pillar layers.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.