Active MEMS damping
US10532923B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Feb 14, 2018 |
| Grant date | Jan 14, 2020 |
| Priority date | — |
| Expiry date | Jul 14, 2038 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB81B2201/045
- WIPO fieldMicro-structural and nano-technology
- WIPO sectorChemistry
Abstract
Methods and apparatus for reducing the oscillation of a MEMS actuator. In one embodiment, a driving signal is generated to adjust the MEMS actuator through a set of driving wires coupled to the MEMS actuator. A motion-induced signal from the set of driving wires coupled to the MEMS actuator is received in response to the driving signal. The motion-induced signal is filtered to generate a filtered motion-induced signal. The filtered motion-induced signal is amplified to generate an amplified filtered motion-induced signal. The driving signal is adjusted based on the amplified filtered motion-induced signal to reduce the oscillation of the MEMS actuator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.