Mask assembly, method of manufacturing thereof, and apparatus including the same
US10533245B2 · kind B2 · utility
4Cited by
1References
20Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 25, 2016 |
| Grant date | Jan 14, 2020 |
| Priority date | — |
| Expiry date | Sep 26, 2036 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC21D8/0205
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A mask assembly, and an apparatus including the same are provided. The mask assembly includes a mask sheet. The mask sheet includes a pattern portion having openings, and a welding portion connected to the pattern portion. The welding portion has a grain size different from a grain size of the pattern portion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.