Mass flow controller and method for controlling a mass flow rate of a gas in a gas stream
US10533982B2 · kind B2 · utility
0Cited by
5References
9Claims
0Family size
Assignee
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Key dates
| Filing date | May 15, 2019 |
| Grant date | Jan 14, 2020 |
| Priority date | — |
| Expiry date | May 15, 2039 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N25/00
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
Systems and method for detecting a concentration of a gas in a gas stream are disclosed. A method includes receiving a gas stream including a carrier gas and a processing gas. Bridge signals of a mass flow sensor are used to produce a processing-gas concentration signal and a gas-stream mass flow rate signal. The gas stream is controlled so a mass flow rate of the processing gas equals a processing-gas-setpoint signal. In some variations, the processing-gas-concentration signal is produced using an upstream temperature of the gas stream and a bridge-derived temperature.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.