Patent · US Active

Method for producing a reflective optical element, reflective optical element, and use of a reflective optical element

US10534269B2 · kind B2 · utility

1Cited by

4References

25Claims

0Family size

Assignee

Carl Zeiss SMT GmbH · DE

Inventors

Markus Bauer · Oberkochen, DE
Ulrich Bingel · Michelfeld, DE
Willi Anderl · Wertingen, DE

Key dates

Filing date	Jul 14, 2017
Grant date	Jan 14, 2020
Priority date	—
Expiry date	Sep 13, 2037

Classification

Technology area (CPC G)Physics
CPC primaryG21K2201/065
WIPO fieldOptics
WIPO sectorInstruments

Abstract

The disclosure provides a method that includes filling a cavity in a substrate with a second material, wherein the substrate includes a first material. The method also includes using galvanic and/or chemical deposition of a third material to apply an overcoating to a first surface of the substrate in a region of the cavity. The method further includes removing the second material from the cavity. In addition, the method includes, before or after removing the second material from the cavity, applying a reflective layer to the overcoating. The disclosure also provides related optical articles and systems.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.