Drive mode and sense mode resonance frequency matching
US10538427B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Aug 21, 2017 |
| Grant date | Jan 21, 2020 |
| Priority date | — |
| Expiry date | Jan 11, 2038 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01C19/5656
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
In some embodiments, a micro electro mechanical system (MEMS) includes a proof mass, sense electrodes, sense circuitry, and a frequency matching circuitry. The proof mass is configured to move responsive to stimuli. The sense electrodes are configured to generate a signal responsive to the proof mass moving. The sense circuitry is coupled to the sense electrodes. The sense circuitry is configured to receive the generated signal and further configured to process the generated signal. The frequency matching circuitry is configured to apply a DC voltage to the sense electrodes. The DC voltage is configured to change a stiffness of a spring of the proof mass. According to some embodiments, the change in the stiffness of the spring matches a resonance frequency between a sense mode and a drive mode. According to some embodiments, the sense electrodes are a comb structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.