Systems and methods for generating an image of an inspection object using an attenuated beam
US10539495B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 14, 2016 |
| Grant date | Jan 21, 2020 |
| Priority date | — |
| Expiry date | Oct 14, 2036 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/002
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
According to the present invention, a probe beam (14) having undergone dispersive Fourier transformation by a dispersive Fourier transformation unit is spatially mapped, an inspection object (18, 20) is irradiated with the probe beam (14), and transmitted light (15) from the inspection object (18, 20) is detected, whereby an image is generated on the basis of the intensity of the transmitted light (15). Accordingly, an imaging apparatus can be provided which can irradiate the inspection object (18, 20) with the weak probe beam (14) having an intensity attenuated by the dispersive Fourier transformation unit, which can generate an image only by detecting the transmitted light (15) from the inspection object (18, 20), and which has a high throughput of generating images while an influence on the inspection object (18, 20) is suppressed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.