Patent · US Active

Thin film bulk acoustic resonator with signal enhancement

US10539537B2 · kind B2 · utility

0Cited by
38References
14Claims
0Family size

Assignee

Inventors

Key dates

Filing dateFeb 26, 2019
Grant dateJan 21, 2020
Priority date—
Expiry dateFeb 26, 2039

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01N2291/0426
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

Sensitivity of thin film bulk acoustic resonance (TFBAR) sensors is enhanced by mass amplification and operating a high frequency.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.