Patent · US Active

Sensor device with a soft magnetic alloy having reduced coercivity, and method for making same

US10539632B2 · kind B2 · utility

0Cited by

3References

14Claims

0Family size

Assignee

MELEXIS TECHNOLOGIES SA · CH

Inventors

Jan-Willem Burssens · Tielt-Winge, BE
Robert Racz · Zug, CH

Key dates

Filing date	Jul 26, 2017
Grant date	Jan 21, 2020
Priority date	—
Expiry date	Dec 4, 2037

Classification

Technology area (CPC H)Electricity
CPC primaryH10N52/00
WIPO fieldMeasurement
WIPO sectorInstruments

Abstract

A sensor device comprising a substrate, the substrate comprising one or more magnetic sensor elements; a first elastomeric material on top of the one or more magnetic sensor elements; a magnetic layer comprising a soft magnetic metal alloy deposited by electroplating or by sputtering on top of the first elastomeric material; and optionally a second elastomeric material on top of the magnetic layer. The substrate may be a CMOS device with IMC encapsulated between two polyimide layers. The magnetic material may be annealed at 250° C. to 295° C. using a constant or rotating magnetic field having a strength in the range from 100 to 300 mTesla. The soft magnetic alloy is arranged as Integrated Magnetic Concentrator (IMC).

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.