Method for controlling the position of a MEMS mirror
US10539780B2 · kind B2 · utility
Assignee
Inventors
Key dates
| Filing date | Oct 23, 2017 |
| Grant date | Jan 21, 2020 |
| Priority date | — |
| Expiry date | Oct 23, 2037 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B7/008
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
According to the present invention there is provided a method of controlling the position of a MEMS mirror in a MEMS device, wherein the MEMS device comprises, a MEMS mirror, a magnet which provides a magnetic field (B), an actuating means which operatively cooperates with the MEMS mirror so that it can apply a force to the MEMS mirror which can tilt the MEMS mirror about at least one rotational axis when the actuating means is provided with a drive signal, wherein the magnitude force applied by the actuating means to the MEMS mirror is dependent on the amplitude of the drive signal, and a detection coil which is mounted on the MEMS mirror, the method comprising the steps of, detecting a change in the resistance (R) of the detection coil so as to detect a change in temperature of the MEMS mirror; determining the drive signal amplitude required to maintain the MEMS mirror at a predefined angular position (Θ); providing the actuating means with a drive signal which has an amplitude which is equal to the determined drive signal amplitude.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.