Sensing analytical instrument parameters, specimen characteristics, or both from sparse datasets
US10541109B2 · kind B2 · utility
1Cited by
4References
22Claims
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Key dates
| Filing date | Jul 26, 2017 |
| Grant date | Jan 21, 2020 |
| Priority date | — |
| Expiry date | Feb 17, 2038 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2237/2826
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
Disclosed are methods for sensing conditions of an electron microscope system and/or a specimen analyzed thereby. Also disclosed are sensor systems and electron microscope systems able to sense system conditions, and/or conditions of the specimen being analyzed by such systems. In one embodiment, a sparse dataset can be acquired from a random sub-sampling of the specimen by an electron beam probe of the electron microscope system. Instrument parameters, specimen characteristics, or both can be estimated from the sparse dataset.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.